1661E SERIES | BROOKS
High Purity MultiFlo Universal Flow Controller
PRODUCT NAME: 1661e Series
BRAND NAME: Celerity
MODEL: UNIT 1661e
The 1661e model MultiFlo mass flow controller offers state-of-the-art, advanced control systems unequalled in the market today. The underlying algorithms provide the best in class accuracy of ±1% setpoint and response of <1 second. The 1661e model can meet specifications for any gas over a large inlet/outlet pressure range, over a wide temperature range, and over a large range of flow rates.
- Replacement MFCs are available in only a few minutes
- 9 standards MFC part numbers cover 85% of all applications
- Enables on-site gas and range changes with no surrogate gas requirements
- Enables last minute changes in gas panel integration without impacting on-time delivery
- Dramatically reduces inventory requirements
Unit digital mass flow controllers and meters with MultiFlo technology are the industry’s most accurate mass flow devices offering ± 1.0% of setpoint accuracy. Other mass flow controllers and meters measure accuracy in percentage of full scale. The high resolution calibration control utilized a 32 point calibration table for each gas, resulting in a ten-fold improvement in accuracy. We guarantee a zero drift to less than 0.6% per year, reducing the number of periodic calibrations needed.
Each MultiFlo digital device can be filed programmed for unlimited process gases with a programmable full scale from 33% to 100% of the maximum specified range. This eliminates the need to purchase spares for each application and lower the cost of ownership. In addition, it reduces costs associated with change of gas and range. The response time can be programmed from less than 1 second up to 20 seconds to meet process requirements. Further, real time in situ calibration, monitoring, diagnostics, and trouble-shooting reduce equipment down-time and cost of ownership.
The 1661e has a dual connector and can be operated in either RS485 port can still be used to read flow and change gases and ranges.
Better by design
The Unit 132 valve incorporated within the 1661e is the premier proportional control valve in the market today. Its unique design has been optimized to eliminate threads and shims that can trap dirt and moisture. In testing, it is subjected to over 10 million cycles with no degradation in performance. The electromagnetic actuator is proven to have superior reliability to piezo actuators and can also operate over a larger pressure range. This design has been used in over 200,000 precision mass flow controllers demonstrating unmatched reliability.
The 3 Sigma guarantee
While others give only one or two sigma limits (66.7% or 95%), Celerity guarantees 3 sigma limits, or 99.7% confidence, on critical parameters.
CrossChek metrology system
CrossChek is a method of ensuring unit-to-unit reproducibility of manufactured flow control products. With CrossChek, a manufacturing transfer standard or “calibrator” is compared against another transfer standard once per day. This “check” ensures that transfer standrds operate within a statistical margin of error from calibrator to calibrator. The result: mass flow controllers and meters comply with published accuracy specifications and lot-to-lot variation is eliminated.
Universal electrical interfaces
Both analog and RS485 protocol options are supported via three built-in connector types:
- 9 pin D-sub (analog)
- 20 pin Cardedge (analog)
- Dual daisy chain 6 position modular jack (RS485)
CE Mark : EMC 89/336/EEC
Power : 160mA (max), ±15 VDC or 11 to 25 VDC
Gas path materials : 316L SS/ 7 Mo (SEMI F20)
Surface finish : 10 or 16µ inch Ra (SEMI F19)
Weight : 2.65 lbs (1.20kg)
Operating Limits (Normally Close / Normally Open)
Burst Pressure : 500 psig
Proof Pressure : 140 psig
Atmospheric Exhaust : 20 psia to 60 psia / 20 psia to 55 psia
Vacuum Exhaust : 20 psia to 55 psia / 20 psia to 50 psia
≤ 1L : 7 psid to 45 psid / 7 psid to 40 psid
≤ 2.6L : 9 psid to 45 psid / 9 psid to 40 psid
≤ 15L : 10 psid to 45 psid / 10 psid to 40 psid
≤ 30L : 15 psid to 45 psid / 15 psid to 40 psid
Operating Range : 10% to 100%
Setpoint Range : 2% to 100% (2% enables auto shut off)
Flow : 60 minutes
Operating Range : 30 to 30,000 sccm
Setpoint Range : 1 to 30,000 sccm
Turndown Ratio : Up to 25:1
Temperature : 0°C to 45°C
10% to 34% : ± 0.35% F.S.
35% to 100% : ± 1.0% S.P.
Differential Temp (Span) : 0.10% F.S. per °C
External : 1x10-10atm.cc/sec He (SEMI E16)
Internal : 1% F.S. (SEMI F1)
Linearity : ±0.50% F.S. (SEMI E27)
Repeatability : ±0.15% F.S. (SEMI E56)
Settling Time : <1 sec (SEMI E17)
Factory Calibration Conditions
Calibration Gas : Nitrogen
Cardinal Verification Pts : 0%, 10%, 25%, 100%
Downrange Ratio : 1:1 (Non-downranged)
Inlet Pressure : 30 to 45 psia
Temperature : 21°C ± 3°C
Mounting Attitude : Horizontal Base Down
Warm Up time : 60 minutes (SEMI E68)