CMC SERIES | BROOKS
Compact Capacitance Diaphragm Gauge
PRODUCT NAME: CMC Series Compact Capacitance Diaphragm Gauge
BRAND NAME: Brooks
MODEL: XacTorr - CMC Series
>>Compact High Performance Design
>>High Accuracy in compact package
Compact, High Performance Design
Used as vacuum gauge of choice for thin-film processes, Brooks XacTorr CMC series Capacitance Diagphragm Gauges(CDGs) provide accurate total pressure measurement independent of gas composition.
The CMC Series delivers exceptional performance over a wide range of temperatures, making it an alternative choice to larger premium performance unheated gauges. The CMC is 40% smaller in size than tradisional unheated Capacitance Manometers.
Ideal for Aggressive Application
The all welded design and inconel wetted surfaces ensures reliable operation in even the most aggressive processes. The combination of precision components and wide temperature compensated operating window allows the CMC to deliver best in class zero and span temperature coefficients for optimum measurement stability.
Available For Typical Process Range
The CMC Series is available in full scales ranges from 1000 Torr to 10 Torr and is an ideal upgrade for small form-factor Capacitance Manometers and an economical alternative to full sized unheated Capacitance Manometers.
- 40% smaller than traditional unheated Capacitance Manometers, the CMC Series delivers similar performance in space saving, economic package
- The optional high accuracy calibration matches the accuracy of more costly premium un-heated Manometers
- The robust all welded construction ensures optimum measurement repeatability compared to other designs that are prone to error inducing internal stresses that cause unpredictable variations in pressure measurement.
Full scale ranges : 10, 20, 50, 100, 200, 500, 1000 Torr
Accuracy : 0.5% of Reading
Resolution : 0.1% of Full Scale
Temp. Effect on Zero : 0.005% FS/Degree C
Temp. Effect on Span : 0.027% Rdg/Degree C
Response Time : 20msec
Operating Temperature : -20 to 80 Degree C
Compensated Temperature : 0 to 50 Degree C
Exposed Materials : Inconel
Over-pressure limit : 45 psia
Weight : 0.3lbs (135 grams)
Input Power : 12 to 30Vdc
Output Signal : 0 - 10Vdc (-10K ohm load)
Power Consumption : <200 mW
Electrical Connectors : 15-pin DSub on 7" cable; 9-pin Dsub; 5-pin terminal strip
Electromagnetic Compatibility Fully CE Certified to EMC Directive 83/336/EEC