Gas Filtration & Purification | ENTEGRIS
When it comes to filtration and purification of air, bulk gas or spec gas, Entegris has the expertise, the technology and the solution to meet your needs.
Whether for point of use or bulk gas delivery, in chamber or on wafer, in the cleanroom or on a tool, Entegris has a long history of providing high-performance gas and air purification and filtration products to meet your needs.
Rapid venting to atmosphere without adding particles to the chamber.
Inorganic regenerable media to purify gas at ambient temperatures to part-per-trillion levels.
Contamination control in gas processes with Nickel, stainless steel and Teflon® filter technologies.
Gas Purification Systems
Automatic regenerating gas purification systems for the removal of contaminants down to the part-per-trillion level
Solution for airborne molecular contamination (AMC) control OR Cleanroom, Scanner and Process Tool Chemical Air Filters