VAISALA K-PATENTS | FILTERFINE
VAISALA K-Patents Refractometer For Semiconductor Process
Semiconductor wafer and microelectronics fabrication is a demanding process with little room for mistakes. The industry depends on high-performing monitoring and measurement instrumentation for precise chemical compositions and atmospheric conditions. We offer semicon process refractometers for in-line concentration monitoring in bulk chemical and slurry delivery dispensing, and point-of-use blending, spiking and polishing processes; as well as instruments for measuring humidity, dew point, temperature and pressure within and surrounding the semiconductor tools and facilities
Vaisala K-PATENTS® process refractometer is designed to measure and indicate inline liquid concentration of almost any chemical or compound.
Vaisala K-PATENTS® Semicon Refractometer can be used to replace expensive and complex analyzers traditionally used in bulk chemical dispensing, and in point-of-use blending, spiking, and monitoring applications throughout the fabrication process in wafer cleaning, wet etch, post-etch wafer cleaning, and chemical mechanical planarization (CMP), kindly register here to download the Application Note for Semiconductor Wet Chemicals.