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​Gas Abatement System

ECOSYS    |   FILTERFINE 

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Gas Abatement System

Filterfine Advanced Technology is exclusive distributor for ECOSYS in Malaysia, Thailand and Vietnam.
Ecosys abatement become the default gas treatment solution for many of the major semiconductor device manufacturers, in all global regions, and worldwide.


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Marathon

​The Marathon is our flagship product and can be used for all process types.
This high capacity unit, can be connected to 6 individual process chambers, and offers abatement to >99.9% DRE on PFC gases without the requirement for a seperate oxygen supply.

Applications
All semiconductor, solar & flat panel display fabrication
Advantages
Excellent PFC abatement efficiency to >99%
Limited NOx and CO emissions
Superior Particulate management technology
High flow capacity up to 700 slm of process gas
Very low freshwater consumption
Low cost of ownership
Ease of installation and servicing
Third party certification, SEMI S2, CE
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CDO (Thermal/Wet)

The CDO series is an advanced point-of-use integrated thermal-wet abatement system designed to treat flourine generated by plasma chamber clean applications, without the use of fuel or toxic reagents. Constructed with advanced metal alloys for corrosion resistance, the CDO 863 is the safest, most cost effective abatement system for the treatment  of F2 at the POU, ensuring  CDOcustomers the highest reliability and tool uptime.

Applications
Flourine based process chamber cleans
Advantages
Designed for POU F2 abatement without fuel or toxic reagents
Will treat incompatible gases from multiple process inlets
Reduced water consumption with recirculation loop
Non-clogging entry design
Low cost of ownership
Advanced alloys for improved corrosion resistance
Ease of installation with pressurized drain
SEMI S2 and CE compliant
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Guardian (Thermal/Burn Box)

The Guardian series is the industry standard for reliable thermal oxidation and combustion of post chamber and cabinet vented process gases. The Guardian utilizes active flame oxidation as the effluent gases pass through a wall of flame in the main chamber, and therefore guaranteeing ignition of all flammable and pyrophoric gas byproducts.
Two sizes of unit are available to meet your requirements. The Guardian GS4 has a 4″ (100mm) reaction chamber and the GS8 unit has a larger capacity 8″ (200mm) reactor. Both unit types can have custom entry heads to handle a mixture of 1/2″ VCR, KF40 or KF50 process inlets.
 
Applications
Polysilicon
CVD
Pyrophoric/Flammable gas combustion
Gas Cabinet vent purge
Advantages
Simultaneous treatment for multple process chambers and/or furnace tubes
Low cost of ownership
No electrically heated elements for immediate cool down
Flame Flashback protection for safe, reliable operation
Natural gas or H2 fueled
No moving parts
Very low maintenance requirement
MTBF measured in years
SEMI S2 and CE compliant
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​Vector (Water Scrubber)

With several different models and entry types, the Vector is a proven solution for abatement in a veriety of processes including EPI, Etch and even SiN. An extensive database of applications and removal efficiencies is used to customise the best solution for a given process type.

Applications
Epitaxy
Etch
Tungsten CVD

Vector 3500
Metal Etch

Vector 6000
Silicon Nitride

Options
Safety containment cage
Chemical Injection
Simple Remote
FILTERFINE ADVANCED TECHNOLOGY SDN BHD
32, Persiaran Mahsuri 1/2,
11900 Bayan Baru, Penang, Malaysia.
Tel : 04-6435761  Fax : 04-6435793
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Copyright @ Filterfine Advanced Technology
2018/2019
  • HOME
  • INDUSTRIES
  • PRODUCT & SERVICES
    • ENTEGRIS >
      • Gas Filtration & Purification
      • Liquid Filtration & Purification
      • POCO Premium Graphite
      • CMP Pad Conditioners
      • Post-CMP Cleaning Brushes
      • Fluid Management
      • Sensing and Control
    • LEVITRONIX >
      • Pumps
      • Pump-Tank Mixers
      • Flow Sensors
      • POU Pressure Kit
      • Dynamic Flow Controller
      • Consoles
      • BEARINGLESS PUMP
      • FLOWMETER
    • VAISALA
    • BROOKS >
      • 1661E SERIES
      • GF100
      • GF120
      • GF125
      • CMC SERIES
      • CMX45/100
      • CMX160 SERIES
      • CDLD/CDLS SERIES
    • KITZ SCT
    • PROSYS >
      • Single Wafer Process Systems
      • Batch Process Systems
      • Other Systems
    • ECOSYS
    • BAG FILTRATION SYSTEMS >
      • SELF-CLEANING FILTER SYSTEMS
  • ABOUT US
  • PAYMENT MODE
  • MAIL FORM
  • CONTACT US
  • LATEST UPDATE