Gas Abatement System
ECOSYS | FILTERFINE |
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Gas Abatement SystemFilterfine Advanced Technology is exclusive distributor for ECOSYS in Malaysia, Thailand and Vietnam.
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MarathonThe Marathon is our flagship product and can be used for all process types.
This high capacity unit, can be connected to 6 individual process chambers, and offers abatement to >99.9% DRE on PFC gases without the requirement for a seperate oxygen supply. Applications All semiconductor, solar & flat panel display fabrication Advantages Excellent PFC abatement efficiency to >99% Limited NOx and CO emissions Superior Particulate management technology High flow capacity up to 700 slm of process gas Very low freshwater consumption Low cost of ownership Ease of installation and servicing Third party certification, SEMI S2, CE |
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CDO (Thermal/Wet)The CDO series is an advanced point-of-use integrated thermal-wet abatement system designed to treat flourine generated by plasma chamber clean applications, without the use of fuel or toxic reagents. Constructed with advanced metal alloys for corrosion resistance, the CDO 863 is the safest, most cost effective abatement system for the treatment of F2 at the POU, ensuring CDOcustomers the highest reliability and tool uptime.
Applications Flourine based process chamber cleans Advantages Designed for POU F2 abatement without fuel or toxic reagents Will treat incompatible gases from multiple process inlets Reduced water consumption with recirculation loop Non-clogging entry design Low cost of ownership Advanced alloys for improved corrosion resistance Ease of installation with pressurized drain SEMI S2 and CE compliant |
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Guardian (Thermal/Burn Box)The Guardian series is the industry standard for reliable thermal oxidation and combustion of post chamber and cabinet vented process gases. The Guardian utilizes active flame oxidation as the effluent gases pass through a wall of flame in the main chamber, and therefore guaranteeing ignition of all flammable and pyrophoric gas byproducts.
Two sizes of unit are available to meet your requirements. The Guardian GS4 has a 4″ (100mm) reaction chamber and the GS8 unit has a larger capacity 8″ (200mm) reactor. Both unit types can have custom entry heads to handle a mixture of 1/2″ VCR, KF40 or KF50 process inlets. Applications Polysilicon CVD Pyrophoric/Flammable gas combustion Gas Cabinet vent purge Advantages Simultaneous treatment for multple process chambers and/or furnace tubes Low cost of ownership No electrically heated elements for immediate cool down Flame Flashback protection for safe, reliable operation Natural gas or H2 fueled No moving parts Very low maintenance requirement MTBF measured in years SEMI S2 and CE compliant |
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Vector (Water Scrubber)With several different models and entry types, the Vector is a proven solution for abatement in a veriety of processes including EPI, Etch and even SiN. An extensive database of applications and removal efficiencies is used to customise the best solution for a given process type.
Applications Epitaxy Etch Tungsten CVD Vector 3500 Metal Etch Vector 6000 Silicon Nitride Options Safety containment cage Chemical Injection Simple Remote |
