Filterfine Advanced Technology is exclusive distributor for KITZ SCT in Malaysia, Thailand and Vietnam.

KITZ SCT | FILTERFINE

Filterfine Advanced Technology is exclusive distributor for KITZ SCT in Malaysia, Thailand and Vietnam.
KITZ SCT, a member of the KITZ Group, a world leading valves manufacturer , providing a wide range of products and services from valves, fittings and integrated system, of gas and liquid, especially for micro-electronics industry.

Ultra High Purity Gas Valves

Ultra High Purity Gas Fittings

Vacuum Valve

Thermoplastic Valve

Gas system unit

Thermoplastic fitting

Other Products

TD Series: Surface Mount and Face Seal

Model: TD series
Description
The TD series is a group of compact, low pressure 1/4 inch UHP diaphragm valves available in both surface mount and conventional designs. The surface mount design is available in both 1.125 and 1.5 inch configurations for both w-seal and c-seal substrates. Face seal and butt weld end connections are also standard in both conventional and block valve designs.
TD valves are standard with 5Ra surface finish and chromium-enriched surface finish from our proprietary electropolishing process. The TD series exceed the stringent requirements demanded from the global semiconductor industry concerning surface finish, chemistry, cleanliness and performance.
DETAIL
1. These valves are diaphragm valves of Surface Mount type, and are compatible with 1.125 inch C-SEAL. Both manual and pneumatic valves in this series incorporate a compact actuator, which allows the valve to suit to fine line pitches.

2. The manual valves are 90° open/close types, and capable of being equipped with a lock key for preventing mis-operations.
3. TD Series has achieved 0.3 for Cv value that is still higher than that of our KD Series.
4. The surface that comes in contact with gases is made rich in chrome, and achieved Cr/Fe>2.0. (SEP specification)
5. Achieving Hv300 on the sealing surface, repeated detachability is further improved.
SPECIFICATION
Type (Size): TD
Cv value: 0.3
Maximum working pressure: 0.98MPa (142psi)
Maximum working temp: PCTFE -10~42°C (14~108F) / PFA -10~120°C (14~248F)
Operating pressure: 0.4~0.7MPa(60~100psi)
Internal leakage allowance: ≤3X10-10Pa•m3/sec(3X10-9atm•cc/s)
External leakage allowance: ≤3X10-12Pa•m3/sec(3X10-11atm•cc/s)
Cycle life: Pneumatic 1,000,000 / Manual 50,000

RD Series: High-Pressure Diaphragm Valve

Model: RD Series
Description
1. A new, high pressure valve that is compactly designed and has a simple external appearance to match today’s needs.
2. Reduced torque and improved durability are added to the manual valve.
3.Simple and compact piping system is made possible by using the automatic valve that has a slim cylinder shape with an air piping in the upper side.
4. Newly added 210K Type, High-Pressure Valve (1/2 inch) satisfies the user seeking Large Volume High-Pressure Valve.
DETAIL
Valve Features: Manual
RD Series consists of High-Pressure Manual Valves featuring a compact body that requires even less torque to operate than the low torque types in the past. Due to the resin-coated handle that is newly employed, you can feel very smooth operation.
A larger window hole and easy-to-see OPEN/CLOSE mark are adopted so that whether it is open or close is instantly noticed. The shunt port of the shunt type can be set to any direction.
Valve Features: Pneumatic
The new cylinder-shaped actuator moves on a minimal line

pitch, thus it is not necessary to consider the orientation after the installation. Also to be noted is the patented wedge-toggle structure that is incorporated in this valve, and ensures the operation even under high surge pressure.
In addition, rigidity at the conjunction point between the body and actuator is increased so that the reliability is increased. It needs 0.4 ~ 0.7Mpa of operating air pressure, and a stable operation is ensured even at the low limit of the air pressure.
SPECIFICATION
Type (Size): 1/8”, 1/4”, 1/2”
Cv Value: 0.04, 0.1, 0.28
Internal volume: 0.12cm3, 1.0cm3, 6.5cm3
Maximum working pressure: 16.2MPa(G.), 16.2MPa(G.),20.6MPa(G.), 20.6MPa(G.)
Maximum working temp: PCTFE: -10~42°C , PI: -10~150°C
Operating pressure: 0.4~0.7MPa(G.)
Internal leakage allowance: Valve Seat Leakage ≤ 3X10-10Pa•m3/s
External leakage allowance: External Leakage ≤ 3X10-12Pa•m3/s
Cycle life: Pneumatic Valve 100,000 repeats (N2 charged, own test), Manual 30,000 repeats (N2 charged, own test)

KD Series

The KD series is the most diverse product family for low pressure, conventional diaphragm valves ranging in size from 1/8 to 3/4 inch.
- High flow applications (to 2.4Cv)
- High temperature (to 250° C)
- High speed operation ( 5 msec)

The KD series is available with two different 316L material (single vs double melt) and both electropolished and non-electropolished. Designs include manual (90°/270°), air operated (N/C N/O), multi-port, block, manifold and opposing valves.

Low Pressure, High Flow Configuration

Model: KD Series: High Flow Configurations
DETAIL
Reduced inner capacity
Minimizing the verticle hole to achieve 1.2cm3 of inner capacity (KD 1/4 inch male CVC type under valve open) adds excellent displacement features to this valve.
Minimal seat volume (0.066cm3)
Reduction of seat surface (0.3cm2) that is in contact with gas enhances the degas features, which in consequence prevents the expansion of plastic caused by the material gases.
Increased seal surface (3.5 times more, compared with previous type of our own)
Increased seal surface prevent internal leakage caused by mixing-in of foreign particles.
Diaphragm
Using cobalt alloy of 500 series that is highly resistant to corrosion, and strict control of rolling process ensures a high durability of the product.
Increased operation speed
Using aluminum as a material for piston increases the valve operation speed.
Spring washer structure

Repulsion of spring water ensures the shut off of the fluid when the valve is closed.
Handle
4 different types, i.e., 90° open/close with lock function, 180° /270° revolving shut off types are available.
SPECIFICATION
Type (Size): KD2(1/8”), KD4(1/4”), KD8(1/2”), KD12(3/4”)
Cv value: 0.05, 0.27, 0.7, 2.4
Internal volume: 0.22cm3 1.2cm3 6.6cm3 34.6cm3
Maximum working pressure: 0.98MPa(G.) (142psig)
Maximum working temp: PCTFE:-10~42°C (14~108F) PFA: Manual Valve-10~150°C, Pneumatic Valve-10~120°C(500,000 repeats at 150°C, actual test) PI:-10~150°C Metal:-10~200°C
Operating Pressure: 0.4~0.7MPa(G.) (60~100psig)
Internal leakage allowance: ≤ 3X10-10Pa•m3/sec (≤ 3X10-9atm cc/sec) ; 5X10-10Pa•m3/sec
External leakage allowance: ≤3X10-12Pa•m3/sec (≤3X10-11atm cc/sec) ; 5X10-10Pa•m3/sec
Cycle Life Pneumatic Valve 2 mil. repeats (N2 charged, own test); Manual 100,000 repeats (N2 charged, own test); 30,000 repeats (N2 charged, own test)

Low Pressure, Metal Seat

Model: KD Series Low Pressure, Metal Seat
DETAIL
Having changed the whole material for actuator to metal, the valve can now be used even at 250°C. In addition, using KITZ SCT’s unique mechanism in place of existing shaft seal bellows achieved high quality, compact and low cost valve.
SPECIFICATION
Type (Size): 1/4” , 1/2” (3/8 ")
Cv value: Normal Temperature: 0.25, 250°C: 0.24, 250°C
Vacuum Inside: 0.23 / Normal Temperature: 0.7, 250°C : 0.5, 250°C

Vacuum Inside: 0.35
Internal volume:1.2cm3 , 6.6cm3
Maximum working pressure: 0.98MPa(G.)
Maximum working temp: -10~250°C
Operating pressure: 0.5~0.7MPa(G.)
Internal leakage allowance: Internal ≤ 3X10-10Pa•m3/S
External leakage allowance: External ≤ 3X10-12Pa•m3/S
Cycle life: 50,000 repeats (N2 charged, own test)

Low Pressure, High Speed

Model: KD Series Low Pressure, High Speed
DETAIL
The electric actuator coupled with the controller, allows high-speed actuation of less than 5ms. The valve is built on the reliable KD Series platform and has an optional heater (hot shell) to extend the temperature rating to 150°C.
SPECIFICATION
Type (Size): 1/4”

Cv value: 40°.15/150°.01
Maximum working pressure: 0.98Mpa(G)
Gate time: <10ms
Material: 316L Double Melt
Seat: PFA
He leak rate: 3X10-12
Cycle life: 2 million plus