SOLARIS    |    ENTEGRIS

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Solaris® Filtration Technology

Brand Name: Mykrolis
Model: Solaris®
Description
The solution for CMP POU Filtration 
As the industry moves to reduce defects on wafers, filtration at point of use will provide additional protection against the delivery of defect causing particles and agglomerates. 
Solaris Technology offers two levels of filtration to choose from depending upon your particular needs. SLR01 is designed for the filtration of fine particle slurries typically used in Copper and STI processes. Whereas, the SLR03 is a more open filter for larger particle slurries typically used for Oxide and other Metal processes. 
 
DETAIL
Superior Gel Holding Capability, Longer Life 
This unique, high density depth filter provides superior agglomerate and gel holding capability. With over four inches of media engineered specifically to retain gels and agglomerates this design ensures longer life over traditional depth filtration while allowing the critical working particles to reach the wafer. 
Self-Venting Design 
Solaris Filters have a self-venting feature which allows bubbles formed during decomposition of some hydrogen peroxide-based slurries to easily flow through filter and not cause “dead space” for potential slurry dry out. 
Less Handling, More Cleanliness And Safety 
The convenient disposable design minimizes exposure to slurry 

while maximizing convenience during filter change out. The self venting feature provides a more efficient start up with less slurry handling. 
​Unique, high-density depth filter 
Superior agglomerate and gel holding capability ensures longer life over traditional depth filters. 
Self-venting filtration 
Eliminates dead space and potential for slurry dry-out in the filtration media, ensuring longer life. 
Available in two retention ratings 
Filters optimized for fine particle slurries or larger particle slurries ensure longer life while allowing critical working particles to reach the wafer. 
Over four inches of specially-designed media 
Provides superior filtration: gel and agglomerate retention to ensure desired particles reach the wafer to optimize planarization processes. 
Disposable Design 
Allows quick installation and minimizes downtime while limiting the handling of hazardous chemicals during the installation and disposal processes, thereby promoting a more healthy workplace. 
 
SPECIFICATION
Solaris Filtration Technology 
Device Length: Inch: 5, 10 
Inlet/Outlet Fittings: 3/8” Flare Fittings ​

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MORE INFO

Solaris Filtration Technology: Solaris Manifold

Brand Name: Mykrolis
Model: Solaris Manifold
Description
The Solution For CMP POU Filtration 
Solaris Filtration Technology delivers long lasting, easy to use, disposable methods of reducing defect causing particles, gels, and agglomerates while simultaneously allowing working particles to pass. Solaris filtration technology deliver greater than 2x the life of conventional depth filters in the most demanding CMP applications. 

DETAIL  
Rapid Filter Change-out 
The Solaris Manifold provides rapid filter change-out with NO tools. You can change the filter in less than 1 minute! Additionally, with its compact, stable design, the Solaris Manifold provides easy installation or retrofit into existing tools. 
Superior Gel Holding Capability, Longer Life 
This unique, high density depth filter provides superior agglomerate and gel holding capability. With over four inches of media engineered specifically to retain gels and agglomerates this design ensures longer life over traditional depth filtration while allowing the critical working particles to reach the wafer. 
Less Handling, More Cleanliness And Safety 
The convenient disposable design minimizes exposure to slurry while maximizing convenience during filter change out. The self venting feature provides a more efficient start up with less slurry handling. 
Self-Venting Design 
Solaris Filters have a self-venting feature which allows bubbles formed during decomposition of some hydrogen peroxide-based 

slurries to easily flow through filter and not cause “dead space” for potential slurry dry out. 
​Less Handling, More Cleanliness And Safety 
The convenient disposable design minimizes exposure to slurry while maximizing convenience during filter change out. The self venting feature provides a more efficient start up with less slurry handling. 
Unique, high-density depth filter 
Superior agglomerate and gel holding capability ensures longer life over traditional depth filters. 
Self-venting filtration 
Eliminates dead space and potential for slurry dry-out in the filtration media, ensuring longer life. 
Available in two retention ratings 
Filters optimized for fine particle slurries or larger particle slurries ensure longer life while allowing critical working particles to reach the wafer. 
Over four inches of specially-designed media 
Provides superior filtration: gel and agglomerate retention to ensure desired particles reach the wafer to optimize planarization processes. 
Disposable Design 
Allows quick installation and minimizes downtime while limiting the handling of hazardous chemicals during the installation and disposal processes, thereby promoting a more healthy workplace. 

SPECIFICATION 
Solaris Filtration Technology Manifold 
Solaris SLR01 with Connectology, 1 μm 
Solaris SLR03 with Connectology, 3 μm ​