CMX45/100 | BROOKS
Digital Capacitance Diaphragm Gauge
PRODUCT NAME: CMX45/100 Digital Capacitance Diaphragm Gauge
BRAND NAME: Brooks
MODEL: XacTorr CMX45/100
>>Advanced Digital Architecture(Patent Pending)
>>Intelli-Touch Zeroing Feature
>>Digital Temperature Control(Patent Pending)
>>Contamination Resistant Sensor(US Patent No. 4,823,603)
Used as vacuum gauge of choice for thin-film processes, Brooks XacTorr digital Capacitance Diapghragm Gauges(CDGs) provide accurate total pressure measurement independent of gas composition.
With advances in digital signal processing, the analog CDG has been updated to enable new features, better accuracy, and a reduction in the drift associated with the aging of old-style analog electronics. By combining Brooks patented sensor technology with new ultrastable digital electronics, the XarTorr digital CDG sets new standards in long-term stability, even in the most aggressive thin-film processes.
XarTorr is offered in multiple operating temperatures for optimum process compatibility, and supports industry standard electrical interfaces, ensuring an upgrade path from legacy analog Capacitance Manometers.
Flexible digital signal processor based electronics eliminates manual potentiometers and drift associated with the aging of old-style analog electronics.
- Multimedia decade digital calibration provides superior window of *known accuracy*
- Real-time compensation of ambient temperature effects of improved measurement repeatability
Intelligent zero adjustment, local local push-button and remote zeroing for ease of maintenance and improved long-term repeatability.
- Intelli-Touch Zeroing ensures that XarTorr cannot be zeroed if the pressure is too high or if the gauge has not reached a stabilized operating temperature - a common operator error with analog CDG'S.
Highly efficient dual-zone temperature control:
- Real-time temperature control of the sensor for improved measurement stability and repeatability.
- Fast warm-up with intuitive temperature status LED
- Rapid response to change system conditions
Unique corrosion resistant, shielded sensor design offers superior protection against condensable process by products, which can degrade accuracy and shorten the life of the instrument.
CMX45 : 45 Degree C
CMX100 : 100 Degree C
Full Range Scale Ranges : 0.1, 1, 2, 10, 20, 100, 1000 Torr
Accuracy : 1 to 1000 Torr Ranges = 0.15% of Reading
<1 Torr Ranges = 0.25% of Reading
Measurement Range : 4 Decades
Temperature Effects on Zero : 0.002% of FS/Degree C
Temperature Effects of Span : 0.02% of FS/Degree C
Exposed Materials : Inconel and/or AISI 316L Stainless Steel
Overpressure limit : 17 PSIA or 125% of Full Scale, whichever is greater
Approximate Shipping Weight : 1.40lbs (726 grams)
Analog Models :
Analog (0-10 VDC 5k Ohm load) : Yes
RS485 : Yes
DeviceNet : No
DeviceNet Models: Analog (0-10 VDC 5k Ohm load) : Yes
RS485 : Yes
DeviceNet : Yes
Analog : 9-Pin Male D Sub or 15-Pin Male D Sub
RS485 : 2.5mm Mini Jack
DeviceNet : 5-Pin EuroFast (DeviceNet) or 15-Pin Female D Sub (Analog)
Relay Contact Rating
(Available on 15-Pin Male D Sub interface) : 1A @ 30 VDC/ 0.3A @ 125VAC
Embient Operating Temperature:
CMX45 : 15-35 Degree C
CMX100 : 15-45 Degree C
Electromagnetic compability : Fully CE Compliant to EMC Directive 89/336/EEC
Power input at Initial Warmup Analog Models, Typical Values
CMX45 : 270mA @ +/-15 VDC (+/-5%)
CMX100 : 620mA @ +/- 15VDC (+/-5%)
Power Input at Steady State Analog Models, Typical Values:
CMX45 : 175mA @ +/- 15VDC (+/-5%)
CMX100 : 350mA @ +/- 15VDC (+/-5 %)
Power Input at Initial Warmup DeviceNet Models, Typical Values:
CMX45 : 400mA @ 24VDC
CMX100 : 900mA @ 24 VDC
Power Input at Steady State DeviceNet Models, Typical Values:
CMX45 : 300mA @ 24VDC
CMX100 : 600mA @ 24 VDC