CMC SERIES | BROOKS
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Compact Capacitance Diaphragm GaugePRODUCT NAME: CMC Series Compact Capacitance Diaphragm Gauge
BRAND NAME: Brooks MODEL: XacTorr - CMC Series CATEGORY: Brooks DESCRIPTION: >>Compact High Performance Design >>High Accuracy in compact package >>Robust Design DETAIL: Compact, High Performance Design Used as vacuum gauge of choice for thin-film processes, Brooks XacTorr CMC series Capacitance Diagphragm Gauges(CDGs) provide accurate total pressure measurement independent of gas composition. The CMC Series delivers exceptional performance over a wide range of temperatures, making it an alternative choice to larger premium performance unheated gauges. The CMC is 40% smaller in size than tradisional unheated Capacitance Manometers. Ideal for Aggressive Application The all welded design and inconel wetted surfaces ensures reliable operation in even the most aggressive processes. The combination of precision components and wide temperature compensated operating window allows the CMC to deliver best in class zero and span temperature coefficients for optimum measurement stability. Available For Typical Process Range The CMC Series is available in full scales ranges from 1000 Torr to 10 Torr and is an ideal upgrade for small form-factor Capacitance Manometers and an economical alternative to full sized unheated Capacitance Manometers. Features - 40% smaller than traditional unheated Capacitance Manometers, the CMC Series delivers similar performance in space saving, economic package - The optional high accuracy calibration matches the accuracy of more costly premium un-heated Manometers - The robust all welded construction ensures optimum measurement repeatability compared to other designs that are prone to error inducing internal stresses that cause unpredictable variations in pressure measurement. SPECIFICATION: Performance Full scale ranges : 10, 20, 50, 100, 200, 500, 1000 Torr Accuracy : 0.5% of Reading Resolution : 0.1% of Full Scale Temp. Effect on Zero : 0.005% FS/Degree C Temp. Effect on Span : 0.027% Rdg/Degree C Response Time : 20msec Operating Temperature : -20 to 80 Degree C Compensated Temperature : 0 to 50 Degree C Mechanical Exposed Materials : Inconel Over-pressure limit : 45 psia Weight : 0.3lbs (135 grams) Electrical Input Power : 12 to 30Vdc Output Signal : 0 - 10Vdc (-10K ohm load) Power Consumption : <200 mW Electrical Connectors : 15-pin DSub on 7" cable; 9-pin Dsub; 5-pin terminal strip Certifications Electromagnetic Compatibility Fully CE Certified to EMC Directive 83/336/EEC |
