Fluid Management | ENTEGRIS
We provide entire system solutions for building a complete, leak-free, reliable fluid handling network from bulk chemical distribution to the point of use.
We have the broadest range of fluid management solutions that maximize fab productivity, improve fab yields and reduce cost of ownership throughout bulk chemical delivery, CMP, WEC and lithography processes.
We have the broadest range of fluid management solutions that maximize fab productivity, improve fab yields and reduce cost of ownership throughout bulk chemical delivery, CMP, WEC and lithography processes.
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Fittings
Clean, robust, leak-free connection technology for high-temperature and high-pressure applications |
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Valves
High-purity, PFA corrosion-resistant valves provide maximum fluid control of corrosive chemicals, DI water, solvents and slurries. The most complete line of fully characterized, reliable, high-purity valves that meet your temperature, pressure, flow, size, configuration and installation specifications. Sizes from 1/4" to 2" with flow Cv up to 60. |
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Photochemical Dispense Pumps
State-of-the-art, two-stage dispense technology enables independent filtration and dispense. Learn how our two-stage dispense technology with a built-in Impact® 8G filter manifold enables independent filtration and dispense. Available for low-, medium- and high-viscosity fluids. Communication systems enable you to network your pumps for efficient process monitoring. |
