GF120 | BROOKS
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Mass Flow ControllerPRODUCT NAME: Mass Flow Controller GF120
BRAND NAME: Brooks MODEL: GF120 CATEGORY: Brooks DESCRIPTION: >>1% digital set point accuracy and < 1 second responce time >>Multi-gas/multi-range user configurability for optimum process flexibility and reduced inventoryinvestment >>Independent service port for data-logging and process development DETAIL: High Performance Flow Control The Brooks Instrument GF120 mass flow controller builds upon Brooks’ leadership position in UHP digital mass flow controllers. Utilizing a new modular format, the GF120 is a universal replacement for legacy Unit® and IntelliFlow series digital and analog products. Brooks’ new sensor technology with improved signal to noise performance and advanced control algorithms deliver enhanced measurement stability and reproducibility for tighter gas chemistry control. The GF120 is a continuous improvement (CIP) design, using reliability engineering and embedded diagnostics to reduce maintenance requirements for a lower cost of ownership. Standard Features • Ultra high purity construction with reduced surface area and removal of unswept volumes for faster dry-down during purge - Surface passivated SEMI F-20 compliant wetted flow path - 4μ inch Ra surface finish • New independent service and diagnostic port support on-tool troubleshooting and process fingerprinting and optimization • New modular architecture supports all industry standards for full OEM and process coverage - Downported 80mm and 92mm C-seal and W-Seal, in 1.125" and 1.5" footprints - 124 mm 4 VCR - 9-pin “D” analog/RS-485 or 5-pin “M8” DeviceNet™ • Gas and range configurable (MG/MR) - MG/MR model created and proven using actual process gases to ensure real world accuracy - Change full scale range up to 3:1 for optimum process and inventory management flexibility - Select from hundreds of Semi gases and gas mixtures Applications • Sub-atmospheric deposition • Plasma enhanced deposition • High density plasma deposition • Low pressure plasma deposition • Plasma enhanced atomic layer deposition • Epitaxial deposition • High temperature annealing • Rapid thermal processing • UHP gas blending Multi Gas/Multi Range Technology Multi gas/ multi range (MG/MR) is a proprietary technology available on all Brooks GF Series MFCs. Our MG/MR technology offers a host of benefits that increase tool uptime, reduce cost of ownership, and improve inventory requirements.Brooks MFCs with MG/MR are offered in nine standard configurations, each programmable for a set of gases and flow ranges. Combined, the nine standard MFCs cover 85% of the gases and flow ranges used in a typical production fab (from 3 sccm to 30 slm, N2 equivalent). MG/MR is offered with a configuration kit which allows the user to program the MFC for desired gas and flow range anywhere, anytime without removing the MFC from the gas panel. Calibration does not require surrogate gases and can be completed in just a few minutes. In a recent benchmark study, we were able to cover an entire semiconductor fab’s MFC inventory requirement with only 23 part numbers (nine configurable MFC part numbers and 14 other unique part numbers), significantly reducing the fab’s inventory requirements Better by Design Brooks GF Series MFCs use a valve, sensor, and bypass design which has been perfected from years of research and testing. Brooks GF Series MFCs are robust, reliable, and field proven. The Brooks solenoid valve has major advantages over other MFC valves (such as piezoelectric valves, which can tend to shed particles). Our valve has only one moving part, and only three parts physically in the gas flow path. This results in no particle generation during normal operation. (Other valves, such as piezoelectrics, can release huge amounts of gas during a failure and can overtax abatement systems.) Multi Gas/Multi Range Benefits • Replacement MFCs are available in only a few minutes • Nine standard MFC part numbers cover 85% of all applications • Enables on-site gas and range changes with no surrogate gas requirements • Enables last minute changes in gas panel integration without impacting on-time delivery • Dramatically reduces inventory requirements • Increases tool uptime SPECIFICATION: GF120 Mass Flow Controllers Specifications Display Type : Top mount integrated Viewing Angle : Fixed Viewing Distance : 10 feet Unit Displayed : Flow (%), temp. (°C) Resolution : 0.1 (unit) Diagnostics Status Lights : MFC health, network status Alarms : Sensor output, control valve output, over temperature, power surge/sag, network interruption Materials Gas Path : SEMI F20 compliant Surface Finish : 4 μ in Ra (0.1 μm Ra) Seals : Metal Weight : <2.65 lbs (1.20 kg) Electrical Power Consumption : 545 mA (max) @ 11 VDC and 250 mA (max) @ 24 VDC 6 watts (max) @ ±15 VDC Certifications : EMC 89/336/3EEC (CE), ODVA, RoHS/WEEE Electronic Communication Interface Options Primary Connectors DeviceNet™ via 5-pin “M8” connector Analog/RS-485 via 9-pin “D” connector Diagnostic Port : RS-485 via 2.5 mm jack Performance Leak Integrity : (external) 1 x 10–11 atm. cc/sec He Linearity : ±0.5% full scale Repeatability and Reproducibility : ±0.15% set point Zero Drift : <0.6% full scale per year Auto Shut-Off : Valve off at set point <2% full scale Warm Up Time : 60 minutes Settling Time : 500 msec Standard Accuracy 5% to 35% : ±0.35% full scale 35% to100% : ±1.0% set point Operating Conditions SH40–SH44 ; SH45–SH46 ; SH47–SH48 Flow Range : 3–860 sccm ; 861–7200 sccm ; 7201–30000 sccm Proof Pressure : 140 psia max Differential Pressure : * 7–45 psid ;10–45 psid ; 15–45 psid** Valve Configuration : Normally closed Temperature Range : 10°C–50°C Zero Temperature Coefficient : 0.005 full scale per ºC |
