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GF120    |    BROOKS


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MORE INFO

Mass Flow Controller

PRODUCT NAME: ​Mass Flow Controller GF120 
BRAND NAME: Brooks
MODEL: GF120
CATEGORY: Brooks

DESCRIPTION: 
>>1% digital set point accuracy and < 1 second responce time
>>Multi-gas/multi-range user configurability for optimum process flexibility
and reduced inventoryinvestment
>>Independent service port for data-logging and process development​

DETAIL:
High Performance Flow Control
The Brooks Instrument GF120 mass flow controller builds upon Brooks’ leadership position in UHP digital mass flow controllers. Utilizing a new modular format, the GF120 is a universal replacement for legacy Unit® and IntelliFlow series digital and analog products.
Brooks’ new sensor technology with improved signal to noise performance and advanced control algorithms deliver enhanced measurement stability and reproducibility for tighter gas chemistry control.
The GF120 is a continuous improvement (CIP) design, using reliability engineering and embedded diagnostics to reduce maintenance requirements for a lower cost of ownership.
Standard Features
• Ultra high purity construction with reduced surface area and removal of unswept volumes for faster dry-down during purge
- Surface passivated SEMI F-20 compliant wetted flow path
- 4μ inch Ra surface finish
• New independent service and diagnostic port support on-tool troubleshooting and process fingerprinting and optimization
• New modular architecture supports all industry standards for full OEM and process coverage
- Downported 80mm and 92mm C-seal and W-Seal, in 1.125" and 1.5" footprints
- 124 mm 4 VCR
- 9-pin “D” analog/RS-485 or 5-pin “M8” DeviceNet™
• Gas and range configurable (MG/MR)
- MG/MR model created and proven using actual process gases to ensure real world accuracy
- Change full scale range up to 3:1 for optimum process and inventory management flexibility
- Select from hundreds of Semi gases and gas mixtures
Applications
• Sub-atmospheric deposition
• Plasma enhanced deposition
• High density plasma deposition
• Low pressure plasma deposition
• Plasma enhanced atomic layer deposition
• Epitaxial deposition
• High temperature annealing
• Rapid thermal processing
• UHP gas blending
Multi Gas/Multi Range Technology
Multi gas/ multi range (MG/MR) is a proprietary technology available on all Brooks GF Series MFCs. Our MG/MR technology offers a host of benefits that increase tool uptime, reduce cost of ownership, and improve inventory requirements.Brooks MFCs with MG/MR are offered in nine standard configurations, each programmable for a set of gases and flow ranges. Combined, the nine standard MFCs cover 85% of the gases and flow ranges used in a typical production fab (from 3 sccm to 30 slm, N2 equivalent).
MG/MR is offered with a configuration kit which allows the user to program the MFC for desired gas and flow range anywhere, anytime without removing the MFC from the gas panel. Calibration does not require surrogate gases and can be completed in just a few minutes. In a recent benchmark study, we were able to cover an entire semiconductor fab’s MFC inventory requirement with only 23 part numbers (nine configurable MFC part numbers and 14 other unique part numbers), significantly reducing the fab’s inventory requirements
Better by Design
Brooks GF Series MFCs use a valve, sensor, and bypass design which has been perfected from years of research and testing. Brooks GF Series MFCs are robust, reliable, and field proven.
The Brooks solenoid valve has major advantages over other MFC valves (such as piezoelectric valves, which can tend to shed particles). Our valve has only one moving part, and only three parts physically in the gas flow path. This results in no particle generation during normal operation. (Other valves, such as piezoelectrics, can release huge amounts of gas during a failure and can overtax abatement systems.)
Multi Gas/Multi Range Benefits
• Replacement MFCs are available in only a few minutes
• Nine standard MFC part numbers cover 85% of all applications
• Enables on-site gas and range changes with no surrogate gas requirements
• Enables last minute changes in gas panel integration without impacting on-time delivery
• Dramatically reduces inventory requirements
• Increases tool uptime

SPECIFICATION:
GF120 Mass Flow Controllers Specifications
Display
Type : Top mount integrated
Viewing Angle : Fixed
Viewing Distance : 10 feet
Unit Displayed : Flow (%), temp. (°C)
Resolution : 0.1 (unit)
Diagnostics
Status Lights : MFC health, network status
Alarms : Sensor output, control valve output, over temperature, power surge/sag, network interruption
Materials
Gas Path : SEMI F20 compliant
Surface Finish : 4 μ in Ra (0.1 μm Ra)
Seals : Metal
Weight : <2.65 lbs (1.20 kg)
Electrical
Power Consumption : 545 mA (max) @ 11 VDC and 250 mA (max) @ 24 VDC
6 watts (max) @ ±15 VDC
Certifications : EMC 89/336/3EEC (CE), ODVA, RoHS/WEEE
Electronic Communication Interface Options
Primary Connectors DeviceNet™ via 5-pin “M8” connector
Analog/RS-485 via 9-pin “D” connector
Diagnostic Port : RS-485 via 2.5 mm jack
Performance
Leak Integrity : (external) 1 x 10–11 atm. cc/sec He
Linearity : ±0.5% full scale
Repeatability and Reproducibility : ±0.15% set point
Zero Drift : <0.6% full scale per year
Auto Shut-Off : Valve off at set point <2% full scale
Warm Up Time : 60 minutes
Settling Time : 500 msec
Standard Accuracy
5% to 35% : ±0.35% full scale
35% to100% : ±1.0% set point
Operating Conditions
SH40–SH44 ; SH45–SH46 ; SH47–SH48
Flow Range : 3–860 sccm ; 861–7200 sccm ; 7201–30000 sccm
Proof Pressure : 140 psia max
Differential Pressure : * 7–45 psid ;10–45 psid ; 15–45 psid**
Valve Configuration : Normally closed
Temperature Range : 10°C–50°C
Zero Temperature Coefficient : 0.005 full scale per ºC
FILTERFINE ADVANCED TECHNOLOGY SDN BHD
32, Persiaran Mahsuri 1/2,
11900 Bayan Baru, Penang, Malaysia.
Tel : 04-6435761  Fax : 04-6435793
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Copyright @ Filterfine Advanced Technology
2018/2019
  • HOME
  • INDUSTRIES
  • PRODUCT & SERVICES
    • ENTEGRIS >
      • Gas Filtration & Purification
      • Liquid Filtration & Purification
      • POCO Premium Graphite
      • CMP Pad Conditioners
      • Post-CMP Cleaning Brushes
      • Fluid Management
      • Sensing and Control
    • LEVITRONIX >
      • Pumps
      • Pump-Tank Mixers
      • Flow Sensors
      • POU Pressure Kit
      • Dynamic Flow Controller
      • Consoles
      • BEARINGLESS PUMP
      • FLOWMETER
    • VAISALA
    • BROOKS >
      • 1661E SERIES
      • GF100
      • GF120
      • GF125
      • CMC SERIES
      • CMX45/100
      • CMX160 SERIES
      • CDLD/CDLS SERIES
    • KITZ SCT
    • PROSYS >
      • Single Wafer Process Systems
      • Batch Process Systems
      • Other Systems
    • ECOSYS
    • BAG FILTRATION SYSTEMS >
      • SELF-CLEANING FILTER SYSTEMS
  • ABOUT US
  • PAYMENT MODE
  • MAIL FORM
  • CONTACT US
  • LATEST UPDATE