CMX160 SERIES | BROOKS
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Digital Capacitance Diaphragm GaugePRODUCT NAME: CMX160 Series Digital Capacitance Diaphragm Gauge
BRAND NAME: Brooks MODEL: XacTorr CMX160 CATEGORY: Brooks DESCRIPTION: >>Advanced Digital Architecture(Patent Pending) >>Digital Calibration >>Intelli-Touch Zeroing Feature >>Digital Temperature Control(Patent Pending) >>Contamination Resistant Sensor(US Patent No. 4,823,603) DETAIL: Products Description Brooks XarTorr CMX160 is a compact heated vacuum gauge providing accurate total pressure measurement independent of gas composition. XarTorr digital architecture delivers improved performance, enables in-situ diagnostics and data-logging facilities while maintaining an industry standard analog interface. Designed for demanding thin-film process such as LPCVD, Nitride and Metal-CVD, the XarTorr CMX160 provides superior reliability by combining Brooks patented shielded sensor technology and patent pending digital temperature control, greatly reducing the buildup of process condensable byproducts that lead to process drift and premature failure of the gauge. XarTorr is offered in multiple ranges and supports industry standard electrical interfaces, ensuring in upgrade path from legacy analog Capacitance Manometers. Features Flexible digital signal processor based electronics eliminates manual potentiometers and drift associated with the aging of old-style analog electronics. Digital precision: - Multimedia decade digital calibration provides superior window of *known accuracy* - Real-time compensation of ambient temperature effects of improved measurement repeatability Intelligent zero adjustment, local local push-button and remote zeroing for ease of maintenance and improved long-term repeatability. - Intelli-Touch Zeroing ensures that XarTorr cannot be zeroed if the pressure is too high or if the gauge has not reached a stabilized operating temperature - a common operator error with analog CDG'S. Highly efficient dual-zone temperature control: - Real-time temperature control of the sensor for improved measurement stability and repeatability. - Fast warm-up with intuitive temperature status LED - Rapid response to change system conditions Unique corrosion resistant, shielded sensor design offers superior protection against condensable process by products, which can degrade accuracy and shorten the life of the instrument. SPECIFICATION: Performance Operating Temperature : 160 Degree C Full Range Scale Ranges : 1, 2, 10, 100, 1000 Torr Accuracy : 1000 Torr Ranges = 0.5% of Reading <10-100 Torr Ranges = 0.25% of Reading; 1 and 2 Torr Ranges = 0.35% Measurement Range : 4 Decades Temperature Effects on Zero : 0.002% of FS/Degree C Temperature Effects of Span : 0.02% of FS/Degree C Mechanical Exposed Materials : Inconel and/or AISI 316L Stainless Steel Overpressure limit : 17 PSIA or 125% of Full Scale, whichever is greater Approximate Shipping Weight : 1.40lbs (726 grams) Outputs Supported Analog Models : Analog (0-10 VDC 5k Ohm load) : Yes RS485 : Yes DeviceNet : No DeviceNet Models: Analog (0-10 VDC 5k Ohm load) : Yes RS485 : Yes DeviceNet : Yes Connectors Analog : 9-Pin Male D Sub or 15-Pin Male D Sub RS485 : 2.5mm Mini Jack DeviceNet : 5-Pin EuroFast (DeviceNet) or 15-Pin Female D Sub (Analog) Relay Contact Rating (Available on 15-Pin Male D Sub interface) : 1A @ 30 VDC/ 0.3A @ 125VAC Enviromental Embient Operating Temperature : 15-35 Degree C Certifications Electromagnetic compability : Fully CE Compliant to EMC Directive 89/336/EEC Power Required Power input at Initial Warmup Analog Models, Typical Values : 620mA @ +/-15 VDC (+/-5%) Power Input at Steady State Analog Models, Typical Values : 550mA @ +/- 15VDC (+/-5%) Power Input at Initial Warmup DeviceNet Models, Typical Values : 1.2mA @ 24VDC Power Input at Steady State DeviceNet Models, Typical Values : 900mA @ 24VDC |
