GF100 | BROOKS
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Mass Flow ControllerPRODUCT NAME: Mass Flow Controller GF100
BRAND NAME: Brooks MODEL: GF100 CATEGORY: Brooks DESCRIPTION: >>1% digital set point accuracy and < 1 second responce time >>Multi-gas/multi-range user configurability for optimum process flexibility and reduced inventoryinvestment >>Independent service port for data-logging and process development DETAIL: High Performance Flow Control The Brooks Instrument GF100 is a robust upgrade for standard high purity (HP) mass flow controllers, offering improved accuracy and cleanliness. Optional electrical adapters ensure drop in compatibility with older style analog flow controllers. Brooks’ new sensor technology with improved signal to noise performance and powerful control algorithms deliver enhanced measurement accuracy and reproducibility for optimal gas chemistry control. The GF100 is designed for long-term reliability with embedded diagnostics and automated zeroing to reduce maintenance for a lower cost of ownership. Standard Features • High purity construction with reduced surface area and removal of unswept volumes for faster dry-down during purge - Surface passivated high purity wetted flow path - 10 μ inch Ra surface finish • Independent service and diagnostic port for on-tool troubleshooting and process fingerprinting and optimization • Integrated high visibility LCD display reports flow (%) and temperature (°C) • Analog and Serial (RS-485), analog 0–5 VDC and DeviceNet™ communication interface• Gas and range user configurable - Multi gas/multi range model created and proven using actual process gases to ensure real world accuracy - Change full scale flow range up to 3:1 for optimum process and inventory management flexibility - Select from hundreds of gases and gas mixtures Applications • Thin-film solar deposition and etch • c-Si deposition • Wear resistant surface coatings • Physical vapor deposition • MEMS manufacturing • Fiber optic and glass coating • Bioreactor gas management • Flame control • Gas blending Multi Gas/Multi Range Technology Multi gas/ multi range (MG/MR) is a proprietary technology available on all Brooks GF Series MFCs. Our MG/MR technology offers a host of benefits that increase tool uptime, reduce cost of ownership, and improve inventory requirements. Brooks MFCs with MG/MR are offered in nine standard configurations, each programmable for a set of gases and flow ranges. Combined, the nine standard MFCs cover 85% of the gases and flow ranges used in a typical production fab (from 3 sccm to 30 slm, N2 equivalent). MG/MR is offered with a configuration kit which allows the user to program the MFC for desired gas and flow range anywhere, anytime without removing the MFC from the gas panel. Calibration does not require surrogate gases and can be completed in just a few minutes. In a recent benchmark study, we were able to cover an entire semiconductor fab’s MFC inventory requirement with only 23 part numbers (nine configurable MFC part numbers and 14 other unique part numbers), significantly reducing the fab’s inventory requirements. Better by Design Brooks MFCs use a valve, sensor, and bypass design which has been perfected from years of research and testing. Brooks MFCs are robust, reliable, and field proven. The Brooks solenoid valve has major advantages over other MFC valves (such as piezoelectric valves, which tend to shed particles). Our valve has only one moving part, and only three parts physically in the gas flow path. This results in no particle generation during normal operation. (Other valves, such as piezoelectrics, can release huge amounts of gas during a failure and can overtax abatement systems.) Multi Gas/ Multi Range Benefits • Replacement MFCs are available in only a few minutes • Nine standard MFC part numbers cover 85% of all applications • Enables on-site gas and range changes with no surrogate gas requirements • Enables last minute changes in gas panel integration without impacting on-time delivery • Dramatically reduces inventory requirements • Increases tool uptime SPECIFICATION: GF100 Mass Flow Controllers Specifications Display Type : Top mount integrated Viewing Angle : Fixed Viewing Distance : 10 feet Unit Displayed : Flow (%), temp. (°C) Resolution : 0.1 (unit) Diagnostics Status Lights : MFC health, network status Alarms : Sensor output, control valve output, over temperature, power surge/sag, network interruption Materials Gas Path : 316L and 304 stainless steel, KM-45 Surface Finish : 10 μ in Ra Seals : Metal Weight : <2.65 lbs (1.20 kg) Electrical Power Consumption : 545 mA (max) @ 11 VDC and 250 mA (max) @ 24 VDC 6 watts (max) @ ±15 VDC Certifications : EMC 89/336/3EEC (CE), ODVA, RoHS/WEEE Electronic Communication Interface Options Primary Connectors : Analog/RS-485 via 9-pin “D” Analog/DeviceNet - DeviceNet via 5-pin “M8” connector - Analog via Hirose connector DeviceNet via 5-pin “M8” connector Diagnostic Port : RS-485 via 2.5 mm jack Performance Leak Integrity (external) : 1 x 10–11 atm. cc/sec He Linearity : ±0.5% full scale Repeatability and Reproducibility : ±0.15% set point Zero Drift : <0.6% full scale per year Auto Shut-Off : Valve off at set point <2% full scale Warm Up Time : 60 minutes Settling Time : 1 second Standard Accuracy 5% to 35% : ±0.35% full scale 35% to100% : ±1.0% set point Operating Conditions SH40–SH44 ; SH45–SH46 ; SH47–SH48 Flow Range : 3–860 sccm; 861–7200 sccm ; 7201–30000 sccm Proof Pressure : 140 psia max Differential Pressure* : 7–45 psid ; 10–45 psid ; 15–45 psid** Valve Configuration : Normally closed Temperature Range : 10°C–50°C Zero Temperature Coefficient : 0.005 full scale per ºC |
