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GF100    |    BROOKS


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MORE INFO

Mass Flow Controller

PRODUCT NAME: ​Mass Flow Controller GF100
BRAND NAME: Brooks
MODEL: GF100
CATEGORY: Brooks

DESCRIPTION: 
>>1% digital set point accuracy and < 1 second responce time
>>Multi-gas/multi-range user configurability for optimum process flexibility
and reduced inventoryinvestment
>>Independent service port for data-logging and process development

DETAIL:
High Performance Flow Control
The Brooks Instrument GF100 is a robust upgrade for standard high purity (HP) mass flow controllers, offering improved accuracy and cleanliness. Optional electrical adapters ensure drop in compatibility with older style analog flow controllers.
Brooks’ new sensor technology with improved signal to noise performance and powerful control algorithms deliver enhanced measurement accuracy and reproducibility for optimal gas chemistry control.
The GF100 is designed for long-term reliability with embedded diagnostics and automated zeroing to reduce maintenance for a lower cost of ownership.
Standard Features
• High purity construction with reduced surface area and removal of unswept volumes for faster dry-down during purge
- Surface passivated high purity wetted flow path
- 10 μ inch Ra surface finish
• Independent service and diagnostic port for on-tool troubleshooting and process fingerprinting and optimization
• Integrated high visibility LCD display reports flow (%) and temperature (°C)
• Analog and Serial (RS-485), analog 0–5 VDC and DeviceNet™ communication interface• 
Gas and range user configurable
- Multi gas/multi range model created and proven using actual process gases to ensure real world accuracy
- Change full scale flow range up to 3:1 for optimum process and inventory management flexibility
- Select from hundreds of gases and gas mixtures
Applications
• Thin-film solar deposition and etch
• c-Si deposition
• Wear resistant surface coatings
• Physical vapor deposition
• MEMS manufacturing
• Fiber optic and glass coating
• Bioreactor gas management
• Flame control
• Gas blending
Multi Gas/Multi Range Technology
Multi gas/ multi range (MG/MR) is a proprietary technology available on all Brooks GF Series MFCs. Our MG/MR technology offers a host of benefits that increase tool uptime, reduce cost of ownership, and improve inventory requirements.
Brooks MFCs with MG/MR are offered in nine standard configurations, each programmable for a set of gases and flow ranges. Combined, the nine standard MFCs cover 85% of the gases and flow ranges used in a typical production fab (from 3 sccm to 30 slm, N2 equivalent).
MG/MR is offered with a configuration kit which allows the user to program the MFC for desired gas and flow range anywhere, anytime without removing the MFC from the gas panel. Calibration does not require surrogate gases and can be completed in just a few minutes. In a recent benchmark study, we were able to cover an entire semiconductor fab’s MFC inventory requirement with only 23 part numbers (nine configurable MFC part numbers and 14 other unique part numbers), significantly reducing the fab’s inventory requirements.
Better by Design
Brooks MFCs use a valve, sensor, and bypass design which has been perfected from years of research and testing. Brooks MFCs are robust, reliable, and field proven.
The Brooks solenoid valve has major advantages over other MFC valves (such as piezoelectric valves, which tend to shed particles). Our valve has only one moving part, and only three parts physically in the gas flow path. This results in no particle generation during normal operation. (Other valves, such as piezoelectrics, can release huge amounts of gas during a failure and can overtax abatement systems.)
Multi Gas/ Multi Range Benefits
• Replacement MFCs are available in only a few minutes
• Nine standard MFC part numbers cover 85% of all applications
• Enables on-site gas and range changes with no surrogate gas requirements
• Enables last minute changes in gas panel integration without impacting on-time delivery
• Dramatically reduces inventory requirements
• Increases tool uptime

SPECIFICATION:
GF100 Mass Flow Controllers Specifications
Display
Type : Top mount integrated
Viewing Angle : Fixed
Viewing Distance : 10 feet
Unit Displayed : Flow (%), temp. (°C)
Resolution : 0.1 (unit)
Diagnostics
Status Lights : MFC health, network status
Alarms : Sensor output, control valve output, over temperature, power surge/sag, network interruption
Materials
Gas Path : 316L and 304 stainless steel, KM-45
Surface Finish : 10 μ in Ra
Seals : Metal
Weight : <2.65 lbs (1.20 kg)
Electrical
Power Consumption : 545 mA (max) @ 11 VDC and 250 mA (max) @ 24 VDC
6 watts (max) @ ±15 VDC
Certifications : EMC 89/336/3EEC (CE), ODVA, RoHS/WEEE
Electronic Communication Interface Options
Primary Connectors : Analog/RS-485 via 9-pin “D”
Analog/DeviceNet
- DeviceNet via 5-pin “M8” connector
- Analog via Hirose connector
DeviceNet via 5-pin “M8” connector
Diagnostic Port : RS-485 via 2.5 mm jack
Performance
Leak Integrity (external) : 1 x 10–11 atm. cc/sec He
Linearity : ±0.5% full scale
Repeatability and Reproducibility : ±0.15% set point
Zero Drift : <0.6% full scale per year
Auto Shut-Off : Valve off at set point <2% full scale
Warm Up Time : 60 minutes
Settling Time : 1 second
Standard Accuracy
5% to 35% : ±0.35% full scale
35% to100% : ±1.0% set point
Operating Conditions
SH40–SH44 ; SH45–SH46 ; SH47–SH48
Flow Range : 3–860 sccm; 861–7200 sccm ; 7201–30000 sccm
Proof Pressure : 140 psia max
Differential Pressure* : 7–45 psid ; 10–45 psid ; 15–45 psid**
Valve Configuration : Normally closed
Temperature Range : 10°C–50°C
Zero Temperature Coefficient : 0.005 full scale per ºC
FILTERFINE ADVANCED TECHNOLOGY SDN BHD
32, Persiaran Mahsuri 1/2,
11900 Bayan Baru, Penang, Malaysia.
Tel : 04-6435761  Fax : 04-6435793
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Copyright @ Filterfine Advanced Technology
2018/2019
  • HOME
  • INDUSTRIES
  • PRODUCT & SERVICES
    • ENTEGRIS >
      • Gas Filtration & Purification
      • Liquid Filtration & Purification
      • POCO Premium Graphite
      • CMP Pad Conditioners
      • Post-CMP Cleaning Brushes
      • Fluid Management
      • Sensing and Control
    • LEVITRONIX >
      • Pumps
      • Pump-Tank Mixers
      • Flow Sensors
      • POU Pressure Kit
      • Dynamic Flow Controller
      • Consoles
      • BEARINGLESS PUMP
      • FLOWMETER
    • VAISALA
    • BROOKS >
      • 1661E SERIES
      • GF100
      • GF120
      • GF125
      • CMC SERIES
      • CMX45/100
      • CMX160 SERIES
      • CDLD/CDLS SERIES
    • KITZ SCT
    • PROSYS >
      • Single Wafer Process Systems
      • Batch Process Systems
      • Other Systems
    • ECOSYS
    • BAG FILTRATION SYSTEMS >
      • SELF-CLEANING FILTER SYSTEMS
  • ABOUT US
  • PAYMENT MODE
  • MAIL FORM
  • CONTACT US
  • LATEST UPDATE