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GF125    |    BROOKS


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MORE INFO

Mass Flow Controller

PRODUCT NAME: ​Mass Flow Controller GF125
BRAND NAME: Brooks
MODEL: GF125
CATEGORY: Brooks

DESCRIPTION: 
>>Ultra fast reponse reduces process stabilization time to drive improves
throughput
>>PTI technology eliminates pressure transient effects for tighten preocess
control Multi-gas/multi-range user configurability support process development, reduces lead-times and inventory requirement
>>Independant service port for data-logging and process fingerprinting

DETAIL:
High Performance Flow Control
The Brooks Instrument GF125 mass flow controller builds upon our leadership position in pressure transient insensitive (PTI) technology. The GF125 is a continuous improvement (CIP) redesign of Brooks’ core PTI technology, delivering enhanced cost of ownership, device to device reproducibility and environmental compliance, to meet the challenges of advanced semiconductor and thin-film processes.
Brooks’ new sensor technology with improved signal to noise performance delivers enhanced measurement stability to drive tighter gas chemistry control while reducing maintenance requirements.
Standard Features
• Ultra high purity construction with reduced surface area and removal of unswept volumes for faster dry-down during purge
- Surface passivated SEMI F-20 compliant wetted flow path
- 4μ inch Ra surface finish
• New independent service and diagnostic port supports on-tool troubleshooting and process optimization
• New modular architecture supports all industry standards for full OEM and process coverage
- Downported 80 mm and 92 mm C-seal and W-Seal, in 1.125" and 1.5" footprints
- 124mm 4 VCR
- 9-pin “D” analog/RS-485 or 5-pin “M8” DeviceNet
• Gas and range configurable (MG/MR)
- MG/MR model created and proven using actual process gases to ensure real world accuracy
- Change full scale flow range up to 3:1 for optimum process and inventory management flexibility
- Select from hundreds of Semi gases and gas mixtures
Applications
• Dielectric etch
• Polysilicon etch
• Metal etch
• Low k deposition
• Sub-atmospheric
• Plasma enhanced deposition
• Plasma enhanced atomic layer deposition
• High density plasma deposition
• Low pressure plasma deposition
• High temperature annealing
• Metal oxide deposition
Ultra Fast Response
Fast set point control via high speed ARM processor and low noise sensor drive circuit. Typical set point response is 300 milliseconds from set point command to desired flow output per SEMI E17-0600 within the recommended operating range.
• Improve wafer throughput by reducing nonproductive flow settling time
• Reduce divert gas consumption and associated abatement costs
Pressure Transient Insensitive (PTI)
GF125 is equipped with PTI technology, which reduces the effect of pressure fluctuations on gas flow. The technology is simple: a powerful ARM processor, integrating thermal flow sensor and pressure transducer outputs, compensate for upstream and downstream pressure transients by directing a control valve to open or close to an appropriate orifice size.
Users report stable flow in typically difficult flow management conditions
• Eliminate overshoot/undershoot and first run effect
• Eliminate regulator burst/sag and MFC crosstalk effect
• Reduce impact of valve sequencing
Multi Gas/Multi Range Technology
MG/MR is a technology that allows users to configure standard configurations (“SHs”) or “blanks” for a variety of supported gases and flow ranges.
This wide dynamic range and configurable gas options enable users to reduce unique inventory requirements.
• Reduce part numbers
• Reduce typical delivery times
• Reduce tool downtime

SPECIFICATION:
GF125 Mass Flow Controllers Specifications
Display
Type : Top mount integrated
Viewing Angle : Fixed
Viewing Distance : 10 feet
Unit Displayed : Flow (%), temp. (°C), pressure (psia/kPa)
Resolution : 0.1 (unit)
Diagnostics
Status Lights : MFC health, network status
Alarms : Sensor output, control valve output, over temperature, over pressure, power surge/sag, network interruption
Materials
Gas Path : SEMI F20 compliant
Surface Finish: 4 μ in Ra (0.1 μm Ra) 
Seals : Metal
Weight : <2.65 lbs (1.20 kg)
Electrical
Power Consumption : 545 mA (max) @ 11 VDC and 250 mA (max) @ 24 VDC
6 watts (max) @ ±15 VDC
Certifications : EMC 89/336/3EEC (CE), ODVA, RoHSWEEE
Electronic Communication Interface Options
Primary Connectors : DeviceNet™ via 5-pin “M8” connector; Analog/RS-485 via 9-pin “D” connector
Diagnostic Port : RS-485 via 2.5 mm jack
Performance
Leak Integrity (external) : 1 x 10–11 atm. cc/sec He
Valve Shut Down (leak by) : 1% full scale flow
Linearity : ±0.5% full scale
Repeatability and Reproducibility : ±0.15% set point
Zero Drift : <0.5% full scale per year
Auto Shut-Off : Valve off at set point <2% full scale
Warm Up Time : 60 minutes
SH40–SH44 SH45–SH46 SH47–SH48
Settling Time : 300 msec ; 400 msec ; 500 msec
Standard Accuracy
5% to 35% : ±0.35% FS ±0.35% ; FS ±0.35% FS
35% to100% : ±1.0% SP ; ±1.0% SP ; ±1.0% SP
High Accuracy option* : 2% to 10% : ±0.05% FS ; ±0.05% FS ; ±0.1% FS
10% to 100% : ±0.5% SP ; ±0.5% SP ; ±1.0% SP
Operating Conditions
SH40–SH44 ; SH45–SH46 ; SH47–SH48

Flow Range : 3–860 sccm ; 861–7200 sccm ; 7201–30000 sccm
Proof Pressure : 140 psia max
Transient Pressure : ±2 psid over 0.1 seconds
Differential Pressure** : 7–45 psid ; 10–45 psid ; 15–45 psid***
Valve Configuration : Normally closed
Temperature Range : 10°C–50°C
Zero Temperature Coefficient : 0.005 full scale per ºC
FILTERFINE ADVANCED TECHNOLOGY SDN BHD
32, Persiaran Mahsuri 1/2,
11900 Bayan Baru, Penang, Malaysia.
Tel : 04-6435761  Fax : 04-6435793
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Copyright @ Filterfine Advanced Technology
2018/2019
  • HOME
  • INDUSTRIES
  • PRODUCT & SERVICES
    • ENTEGRIS >
      • Gas Filtration & Purification
      • Liquid Filtration & Purification
      • POCO Premium Graphite
      • CMP Pad Conditioners
      • Post-CMP Cleaning Brushes
      • Fluid Management
      • Sensing and Control
    • LEVITRONIX >
      • Pumps
      • Pump-Tank Mixers
      • Flow Sensors
      • POU Pressure Kit
      • Dynamic Flow Controller
      • Consoles
      • BEARINGLESS PUMP
      • FLOWMETER
    • VAISALA
    • BROOKS >
      • 1661E SERIES
      • GF100
      • GF120
      • GF125
      • CMC SERIES
      • CMX45/100
      • CMX160 SERIES
      • CDLD/CDLS SERIES
    • KITZ SCT
    • PROSYS >
      • Single Wafer Process Systems
      • Batch Process Systems
      • Other Systems
    • ECOSYS
    • BAG FILTRATION SYSTEMS >
      • SELF-CLEANING FILTER SYSTEMS
  • ABOUT US
  • PAYMENT MODE
  • MAIL FORM
  • CONTACT US
  • LATEST UPDATE